When you miniaturize mechanics, surprising things start to happen. One result is that the mechanical noise becomes significant or even performance limiting factor as the device size is shrunk to micron scale. The "Noise in micromechanical systems" -tutorial a pdf-file derives Johnson-Nyguist noise for mechanical resonators. The noise performance is exemplified by analyzing the noise micromechanical accelerometer and theoretically attainable noise performance is compared to commercial devices.
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Market driven coverage. Focus is on proven applications that are showing revenue growth. Emerging applications are evaluated in terms of competing technologies.
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